T200 & T300 ButtonTile™ Probe Cards

The Celadon T200™/T300™ probe cards are designed for long-term, multi-site, high-density wafer level reliability tests up to 400°C.

 

In today’s economic environment, conventional reliability data is needed quickly while eliminating the cost, electrical stress, and delay of parts packaging  while maintaining a wafer performance map.

ButtonTile™ probe cards eliminate the need for constant monitoring and adjustment - after aligning the probe card, simply walk away and let the prober do its job.

 

A 200mm T200 probe card can accomodate up to 5,000 probes, and a 300mm T300 probe card can accomodate up to 10,000 probes.

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Low Leakage at 10 seconds:

  • Leakage < 5fA/V from -65° to 75°C
  • Leakage < 10 fA/V from 75° to 100°C
  • Leakage < 50 fA/V from 100° to 150°C
  • Leakage < 300 fA/V from 150° to 200°C
  • Leakage < 1pA/V from 200° to 300°C
  • Standard operating range -60° to 300°C, optional to 400°C

  • Up to 5,000 probes per T200
  • Up to 10,000 probes per T300
  • Minimum pitch pattern-dependent
  • Standard X-Y accuracy 10% pad size
  • Standard Z variation: +/- 12 microns over entire probe card
  • Coverage areas: T200 - 180mm; T300 - 280mm
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