MPI TS3000-SE Automated Wafer Probe System with ShielDEnvironment™

The TS3000-SE is the consequent further development of the TS3000 probe system equipped with MPI ShielDEnvironment™ for ultra-low noise, extremely accurate and highly reliable DC/CV, 1/f, RTS and RF measurements, addressing primarily the needs of the Device CharacterizationWafer Level Reliability and RF & mmW applications.

 

The exclusive, actively cooled probe platen design provides maximal stability over the wide temperature range from -60° to 300°C and is making the TS3000-SE probe system an excellent choice for testing devices under different thermal conditions.

MPI ShielDEnvironment™ is a high performance local environmental chamber providing excellent EMI- and light-tight shielded test environment for ultra-low noise, low capacitance measurements.

 

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Data Sheet

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