High Power Probe Stations

10 kV – 600 A

MPI High-Power device characterization systems are specifically designed for on-wafer high power device testing. These systems support up to 3 kV triaxial / 10 kV coaxial and 600 A (pulsed) accurate measurements while providing a low-noise, fully shielded test environment.

High Power Probe System Solutions


MPI high power probing solutions offer variety of probing systems which include manual to automated versions to provide solution for different budgets and specific requirements.


MPI TS150-HP and TS200-HP probe systems provide a complete 150 mm and 200 mm on-wafer solution. They are engineered to achieve low contact resistance measurements of power semiconductor under wide range of temperatures.


MPI automated high power systems provide automated high through-put measurements by programming step-and-repeat functionality through MPI SENTIO® prober control software.


TS2000-DP is designed for open and flexible measurement set up with supporting over temperature measurement up to 300 °C. Its open platen design make it possible to upgrade system for voltage higher than 10 kV, in the future and hence provide value for your investment.


TS2000-HP comes with MPI ShielDEnvironment™, providing wide temperature range from negative temperature as low as -60 °C to higher temperature of 300 °C. It is base on MPI’s TS2000-SE system and thus offers higher functionality to increase throughput; such as automatic side wafer loading, hot temperature wafer swap capability and low-noise nature of the shielded system.

Please contact us
Address: Heilbronner Str. 17, 01189 Dresden, Germany
Phone: +49 (0) 351 2138640
Fax: +49 (0) 351 2138650
E-Mail: atv@atv-systems.de
© 2020 AutomatisierungsTechnik Voigt GmbH
First Contact in Measurement Technology

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