TS300-PCB

The MPI unique air-bearing stage design, with simple single-handed puck control, provided unsurpassed convenience of operation for fast XY navigation and quick wafer loading without compromising accurate and fine positioning capability with the additional fine and accurate 25×25 mm XY-Theta micrometer movement.

The highly repeatable (1 µm) platen lift design with three discrete positions for contact, separation (300 µm), and loading (3 mm) with a safety lock utility are all examples of unparalleled functionality incorporated into MPI TS300-PCB manual probe system. These features prevent unexpected probe or wafer damage while providing intuitive control, accurate contact positioning, and safety set-up. This capability is especially critical if probes in mmW and sub-THz range are so cost intensive.
Additional Probe Hover Control™ comes with hover heights (50, 100 or 150 µm) for easy and convenient probe to pad alignment.

TS300-PCB offers a standard 20 mm probe platen height movement and rectangular or arbitrary adjustments for MPI RF MicroPositioners providing TDR impedance, S-parameters, cross-talk, broadband S-parameter measurements up to 220 GHz. In combination with the large microscope movement and the special PCB holder, the platen design makes the system capable for probing over an expanded area of 20” x 18” (500 x 460 mm).

TS300-PCB can accommodate a variety of ambient or 300 mm PRIME thermal chucks and/or a large holder for printed circuits board’s sizes up to 24” x 20”(610 mm x 500 mm). The dedicated PCB holder can be used for probing on smaller boards down to 2”x 2” (50 mm x 50 mm) or up to packaged ICs and incorporates two AUX chucks made of ceramics for accurate RF calibration in the mmW range.